OFHC Copper Backing Plates
plates are machined from oxygen-free, high conductivity copper. Those
identified in the chart by diameter and thickness only are plain discs
without through or tapped holes. They are suitable for most circular
target sources from other manufacturers although they may need minor
machining for screw, clamps, etc.
using 0.125" thick targets, the three smallest sizes of Torusбу
sputter source (1", 2", and 3" diameter) use the 0.125" thick backing
plates of the appropriate diameter without modification. For targets
of other thickness, choose the backing plate thickness to adjust the
total thickness to 0.250". The Torus 10 sources, with their central
protruding magnet, use a full target thickness of 0.625" (5/8"). The
half height backing plate of 0.50" thickness, for example should be
matched with targets 0.125" (1/8") thick.
OD x Thickness (in.)