OFHC Copper Backing Plates

Our backing plates are machined from oxygen-free, high conductivity copper. Those identified in the chart by diameter and thickness only are plain discs without through or tapped holes. They are suitable for most circular target sources from other manufacturers although they may need minor machining for screw, clamps, etc.

When using 0.125" thick targets, the three smallest sizes of Torusбу sputter source (1", 2", and 3" diameter) use the 0.125" thick backing plates of the appropriate diameter without modification. For targets of other thickness, choose the backing plate thickness to adjust the total thickness to 0.250". The Torus 10 sources, with their central protruding magnet, use a full target thickness of 0.625" (5/8"). The half height backing plate of 0.50" thickness, for example should be matched with targets 0.125" (1/8") thick.

Size
OD x Thickness (in.)
Part No.
1.0" diam x 0.0625 EJBPCU01A1
1.0" diam x 0.125 EJBPCU01A2
1.0" diam x 0.250 EJBPCU01A4
1.0" diam x 0.50 EJBPCU01A8
2.0" diam x 0.0625 EJBPCU02A1
2.0" diam x 0.125 EJBPCU02A2
2.0" diam x 0.250 EJBPCU02A4
2.0" diam x 0.50 EJBPCU02A8
3.0" diam x 0.0625 EJBPCU03A1
3.0" diam x 0.125 EJBPCU03A2
3.0" diam x 0.250 EJBPCU03A4
3.0" diam x 0.50 EJBPCU03A8
4.0" diam x 0.0625 EJBPCU04A1
4.0" diam x 0.125 EJBPCU04A2
4.0" diam x 0.250 EJBPCU04A4
4.0" diam x 0.50 EJBPCU04A8
5.0" diam x 0.0625 EJBPCU05A1
5.0" diam x 0.125 EJBPCU05A2
5.0" diam x 0.250 EJBPCU05A4
5.0" diam x 0.50 EJBPCU05A8
6.0" diam x 0.0625 EJBPCU06A1
6.0" diam x 0.125 EJBPCU06A2
6.0" diam x 0.250 EJBPCU06A4
6.0" diam x 0.50 EJBPCU06A8
8.0" diam x 0.0625 EJBPCU08A1
8.0" diam x 0.125 EJBPCU08A2
8.0" diam x 0.250 EJBPCU08A4
8.0" diam x 0.50 EJBPCU08A8
10.0" diam x 0.125 EJBPCU10A2
10.0" diam x 0.250 EJBPCU10A4
10.0" diam x 0.50 EJBPCU10A8
Torus 10 Half (6.375" x 0.50") EJBPT10HALF